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conference paper not in proceedings
Piezoelectric Nanoelectromechanical Systems
July 27, 2017
In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.
Type
conference paper not in proceedings
Author(s)
Date Issued
2017-07-27
Total of pages
4
Subjects
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Kaohsiung, Taiwan | June 18-22, 2017 | |
Available on Infoscience
February 2, 2018
Use this identifier to reference this record