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2009
Epitaxial Thin Films on Silicon for MEMS devices
conference presentation
Type
conference presentation
Author(s)
Date Issued
2009
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Sorrento | March 25-27, 2009 | |
Available on Infoscience
January 25, 2010
Use this identifier to reference this record