research article
Contribution to quantitative measurement of the In composition in GaN/InGaN multilayers
The In composition is investigated in GaN/InGaN multi-quantum wells (QWs) by measurement of the local lattice distortion in high-resolution electron microscopy (HREM) images taken along the [1120] zone axis by image processing. The direct peak-finding procedure is more adequate for analysing images taken in the [1120] zone axis in comparison with the geometric-phase method since the information from different beams must be averaged. The finite element (FE) modelling and image simulation were combined in order to determine the error bars of the composition evaluation. (C) 2003 Elsevier Science B.V. All rights reserved.
Type
research article
Author(s)
Date Issued
2003
Published in
Volume
81
Issue
2-3
Start page
273
End page
276
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
October 5, 2010
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