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  4. Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films
 
research article

Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

Sandu, C. S.  
•
Parsapour, F.  
•
Xiao, D.  
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March 1, 2020
Thin Solid Films

Sputter deposited A1ScN films with an Sc content of 38 at % were investigated by X-ray diffraction and electron microscopy to study the influence of the radio frequency (RF) bias on the growth of abnormally oriented grains (AOG). Scanning electron microscopy investigations showed that the nucleation and growth of AOGs occurs with applied negative RF-bias fill 4 W (51 mW/cm(2)), while the complete loss of AOGs happens at biases larger than 6 W (76 mW/cm(2)). The lack of AOGs within the film occurs together with the loss of the preferred (0001)-texture. At high bias powers, the (0001)-texture nucleates due to the strong (111)-texture of Pt-layer, but grain orientation becomes random during growth. The change of film microstructure with higher biases is reflected in the decay of piezoelectric properties. The concentration of trapped Ar atoms into the films increased with increasing bias power. The variation of the Ar-content along the film cross-section was ascribed to RF bias instabilities.

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Type
research article
DOI
10.1016/j.tsf.2020.137819
Web of Science ID

WOS:000522652700025

Author(s)
Sandu, C. S.  
•
Parsapour, F.  
•
Xiao, D.  
•
Nigon, R.  
•
Riemer, L. M.  
•
LaGrange, T.  
•
Muralt, P.  
Date Issued

2020-03-01

Published in
Thin Solid Films
Volume

697

Article Number

137819

Subjects

Materials Science, Multidisciplinary

•

Materials Science, Coatings & Films

•

Physics, Applied

•

Physics, Condensed Matter

•

Materials Science

•

Physics

•

aluminum nitride

•

scandium

•

thin films

•

rf-bias

•

abnormal oriented grain

•

thickness dependence

•

coefficients

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SCI-STI-DD  
LC  
CIME  
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Available on Infoscience
April 16, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/168183
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