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conference paper
New results on powder blasting techniques applied to the manufacture of piezocomposite structures
2002
Proceedings of the Ultrasonics Symposium
We present the last results concerning investigation of powder blasting techniques to micromachined complex-patterned piezoelectric composite transducers. This technology consists of a beam of eroding powder particles, etching an in-situ-masked PZT plate. We manufacture honeycomb-patterned structures, which can not be achieved with a standard saw-dicing technique.
Type
conference paper
Authors
Publication date
2002
Published in
Proceedings of the Ultrasonics Symposium
ISBN of the book
0-7803-7582-3
Volume
2
Start page
1115
End page
1118
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place | Event date |
Munich, Germany | October 8-11, 2002 | |
Available on Infoscience
October 26, 2005
Use this identifier to reference this record