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  4. Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size
 
research article

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Buhlmann, S.
•
Dwir, B.
•
Baborowski, J.  
Show more
2002
Applied Physics Letters

An epitaxial 200 nm thick film of Pb(Zr0.40Ti0.60)O-3 (PZT) has been deposited by reactive rf magnetron sputtering on conductive Nb-doped SrTiO3 (100) (STO). The patterning process involved electron-beam lithography of polymethylmethacrylate, fabrication of a 75 nm thick Cr hard mask layer by means of a lift-off process, and dry etching of PZT. The smallest PZT features obtained were 100 nm in lateral dimensions. Piezoelectric sensitive scanning force microscopy in the contact mode revealed a strong increase of the piezoelectric response for feature sizes with lateral dimensions below 300 nm. It is proposed that this behavior is mainly due to vanishing a domains. (C) 2002 American Institute of Physics.

  • Details
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Type
research article
DOI
10.1063/1.1475369
Author(s)
Buhlmann, S.
•
Dwir, B.
•
Baborowski, J.  
•
Muralt, P.  
Date Issued

2002

Published in
Applied Physics Letters
Volume

80

Issue

17

Start page

3195

End page

3197

Subjects

thin-films

•

domain

•

capacitors

•

cells

Note

Buhlmann, S Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Inst Photon & Quantum Elect, CH-1015 Lausanne, Switzerland

544EB

Cited References Count:19

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233479
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