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conference paper
Establishment of a technology platform for epitaxial piezoelectric MEMS
2008
Proceedings of 22nd International Conference Eurosensors
Type
conference paper
Authors
•
•
Gariglio, S.
•
Sambri, A.
•
Stucki, N.
•
Triscone, J.-M.
•
Guy, F.
•
Baek, S.-H.
•
Eom, C.-B.
•
Reiner, J. W.
Publication date
2008
Published in
Proceedings of 22nd International Conference Eurosensors
Volume
1
Start page
819
End page
822
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place | Event date |
Dresden, Germany | September 7-10, 2008 | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record