Loading...
research article
Accurate nonlinear phase step estimation in phase shifting interferometry
We propose a new method for the accurate estimation of nonlinear response of the PZT to the applied voltage. The method uses discrete chirp Fourier transform for the coarse estimation followed by a fine search method for the accurate estimation of the phase step and nonlinearity. The method can be extended to the cases of extraction of multiple phases in the configurations involving multiple PZTs such as holographic moire in the presence of nonlinearity. The robustness of the proposed method is verified by comparing with Cramer-Rao lower bound. Experimental results prove the method's feasibility. (c) 2006 Elsevier B.V. All rights reserved.
Type
research article
Authors
Publication date
2006
Publisher
Published in
Volume
266
Start page
638
End page
647
Subjects
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 27, 2011
Use this identifier to reference this record