Spatio-temporal powder formation and trapping in RF Silane plasmas using 2-D polarization-sensitive laser scattering

report

Spatio-temporal powder formation and trapping in RF Silane plasmas using 2-D polarization-sensitive laser scattering

•

Hollenstein, Ch.

•

1994

Name

lrp_506_94_hq.pdf

Access type

openaccess

Size

3.18 MB

Format

Adobe PDF

Checksum (MD5)

2b7a101413775d1f08921225b75c8288