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conference paper
Solid-gap resonators based on PVDF-TrFE
2016
2016 IEEE Silicon Nanoelectronics Workshop (SNW)
High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gaps applied in RF MEMS is presented for the first time. Measurements of the polarization of the material and the frequency and voltage dependence of the capacitance in the actuation gaps of the resonators are provided.
Type
conference paper
Web of Science ID
WOS:000391250500031
Authors
Lopez, Mariazel Maqueda
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Publication date
2016
Publisher
Publisher place
New York
Published in
2016 IEEE Silicon Nanoelectronics Workshop (SNW)
Total of pages
2
Start page
72
End page
73
Peer reviewed
NON-REVIEWED
Written at
EPFL
Event name | Event place | Event date |
Honolulu, HI, USA | 12-13 June 2016 | |
Available on Infoscience
October 14, 2016
Use this identifier to reference this record