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conference paper

Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition

Hoffmann, Patrik 
•
Utke, Ivo
•
Cicoira, Fabio
2002
10th International Symposium on Nanostructures: Physics and Technology
Type
conference paper
DOI
10.1117/12.510421
Web of Science ID

WOS:000184080700002

Authors
Hoffmann, Patrik 
•
Utke, Ivo
•
Cicoira, Fabio
Publication date

2002

Publisher

IOFFE Institute

Published in
10th International Symposium on Nanostructures: Physics and Technology
Start page

5

End page

11

Subjects

[NRG]

Note

Invited

EPFL units
LOA 
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41741