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  4. Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition
 
research article

Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition

Kindt, J. H.
•
Fantner, G. E.  
•
Thompson, J. B.
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2004
Nanotechnology

We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precisely place the tips on the cantilevers. We demonstrate the capabilities of the working system on a four-inch wafer of microfabricated small cantilevers with a total of approximately 2100 levers per week.

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Type
research article
DOI
10.1088/0957-4484/15/9/005
Web of Science ID

WOS:000224022800005

Author(s)
Kindt, J. H.
Fantner, G. E.  
Thompson, J. B.
Hansma, P. K.
Date Issued

2004

Published in
Nanotechnology
Volume

15

Issue

9

Start page

1131

End page

1134

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LBNI  
Available on Infoscience
November 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/56758
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