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  4. A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films
 
conference paper

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

Hartmann, Florian  
•
Eroglu, Seniz E. Kucuk
•
Navarro-Gesse, Edgar
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January 1, 2023
2024 Ieee International Microwave Filter Workshop, Imfw
2nd IEEE-MTT-S International Microwave Filter Workshop (IMFW)

This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well as a floating electrode made of aluminum deposited on the backside of the membrane. Through vertical field excitation, shear waves are excited with very good performances. The resonator displays more than 40% of electromechanical coupling at 3.3 GHz and 4.2 GHz. We used simulation and characterization results to synthesize and simulate filters and show the potential of this resonator for wideband filtering applications like the n77 band.

  • Details
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Type
conference paper
DOI
10.1109/IMFW59690.2024.10477114
Web of Science ID

WOS:001196000800023

Author(s)
Hartmann, Florian  
•
Eroglu, Seniz E. Kucuk
•
Navarro-Gesse, Edgar
•
Collado, Carlos
•
Mateu, Jordi
•
Guillermo Villanueva, Luis Guillermo  
Corporate authors
IEEE
Date Issued

2023-01-01

Publisher

IEEE

Publisher place

New York

Published in
2024 Ieee International Microwave Filter Workshop, Imfw
ISBN of the book

979-8-3503-4532-2

Start page

78

End page

80

Subjects

Technology

•

Mems Resonators

•

Lithium Niobate

•

5G Filter

•

N77 Band

•

Microfabrication

•

Electromechanical Coupling

•

Shear Wave

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
2nd IEEE-MTT-S International Microwave Filter Workshop (IMFW)

Cocoa Beach, FL

FEB 21-23, 2024

Available on Infoscience
May 1, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/207637
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