doctoral thesis
Realization miniaturised low voltage electron beam system for lithography application.
DESPONT, Michel
1997
Type
doctoral thesis
Author(s)
DESPONT, Michel
Advisors
Date Issued
1997
Publisher
Note
Jury: H.P. Herzig (IMT-UniNE), P. Vettiger (IBM ZH), P. Chang (IBM ZH), U. Staufer (Uni Bâle).
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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