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research article
Spectroscopic ellipsometry of RuO2 films prepared by metalorganic chemical vapor deposition
Type
research article
Web of Science ID
WOS:A1995TF57400009
Author(s)
Date Issued
1995
Publisher
Published in
Volume
67
Issue
21
Start page
3078
End page
80
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 21, 2006
Use this identifier to reference this record