Superconducting YBa2Cu3O7-δ (YBCO) thin films have been grown in situ on Si with conducting indium-tin-oxide (ITO) buffer layers. ITO allows YBCO to be electrically connected to the underlying Si substrate. Both the YBCO film and ITO buffer layer, grown by ion beam sputtering, are textured and polycrystalline with a combined room-temperature resistivity of about 2 mΩ cm. Superconducting onsets are 92 K with zero resistance at 68 K