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research article

Capacitive Polysilicon Resonator with MOS Detection Circuit

Linder, C.
•
Zimmermann, E.
•
de Rooij, N. F.  
1991
Sensors and Actuators A: Physical
Type
research article
DOI
10.1016/0924-4247(91)87056-9
Author(s)
Linder, C.
•
Zimmermann, E.
•
de Rooij, N. F.  
Date Issued

1991

Published in
Sensors and Actuators A: Physical
Volume

25-27

Start page

591

End page

595

Note

50

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39551