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Multiwavelength High Resolution Interference Microscopy (HRIM) for the characterization of small size microlenes

Kim, M.-S. 
2010
Annual Conference of Association des Scientiques Coréens en France (ASCoF)
  1. Introduction Definitions of microlens and Challenges for small size 2. High Resolution Interference Microscope (HRIM) System and Upgraded features 5 frame phase shift algorithm 3. Principle of characterization of microlenses Standard tests Unconventional tests 4. Experiments Test results and discussions 5. Conclusion
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Multiwavelength High Resolution Interference Microscopy for the characterization of small size microlenes_2010.pdf

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