Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. 90 MHz nanomechanical structures fabricated by stencil deposition and dry etching
 
conference poster not in proceedings

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

Kim, G M  
•
van den Boogaart, M A F  
•
Kawai, S
Show more
2003
12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)

We present a simple method for fabricating nanomechanical elements with ultra high resonance frequency. The process is based on local deposition through a miniaturized shadow mask (nanostencil), followed by dry etching to release the structure from the substrate. The resonance frequency of a fabricated Al/SiN nanomechanical structure has been measured using a hetrodyne doppler interferometer to be up to 90 MHz. This resistless and dry process provides a flexible, rapid and stiction-free approach for the fabrication of high frequency resonating elements in various materials.

  • Details
  • Metrics
Type
conference poster not in proceedings
Author(s)
Kim, G M  
van den Boogaart, M A F  
Kawai, S
Kawakatsu, H
Brugger, J  
Date Issued

2003

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)

Boston, USA

8-12 June, 2003

Available on Infoscience
March 2, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/3391
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés