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RF inductive probe to measure plasma complex conductivity

Howling, Alan  
•
Guittienne, Philippe  
•
Jacquier, Remy
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2016
69th Annual Gaseous Electronics Conference

Invited talk, publication in 2017: Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source Ph Guittienne, R Jacquier, A A Howling, and I Furno. Plasma Sources, Sci. Technol. 26, 035010 (2017).

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Type
conference presentation
Author(s)
Howling, Alan  
•
Guittienne, Philippe  
•
Jacquier, Remy
•
Furno, Ivo  
Date Issued

2016

Written at

OTHER

EPFL units
SPC  
Event nameEvent placeEvent date
69th Annual Gaseous Electronics Conference

Bochum, Germany

October 10-14, 2016

Available on Infoscience
February 27, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/134838
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