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Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers
research article
Type
research article
Author(s)
Date Issued
1990
Published in
Volume
21-23
Start page
1053
End page
1059
Note
34
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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