Loading...
Thumbnail Image
research article

Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers

Linder, C.
•
de Rooij, N. F. 
1990
Sensors and Actuators A
Type
research article
DOI
10.1016/0924-4247(90)87088-Z
Authors
Linder, C.
•
de Rooij, N. F. 
Publication date

1990

Published in
Sensors and Actuators A
Volume

21-23

Start page

1053

End page

1059

Note

34

Peer reviewed

REVIEWED

EPFL units
SAMLAB 
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39546