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Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Herle, Dorian  
•
Kiselev, Andrei  
•
Villanueva, Luis Guillermo  
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May 31, 2023
Acs Photonics

Reflectivity modulation is a critical feature for applicationsin telecommunications, 3D imaging and printing, advanced laser machining,or portable displays. Tunable metasurfaces have recently emerged asa promising implementation for miniaturized and high-performance tunableoptical components. Commonly, metasurface response tuning is achievedby electro-optical effects. In this work, we demonstrate reflectivitymodulation based on a nanostructured, mechanically tunable, metasurface,consisting of an amorphous silicon nanopillar array and a suspendedamorphous silicon membrane with integrated electrostatic actuators.With a membrane displacement of only 150 nm, we demonstrate reflectivitymodulation by Mie resonance enhanced absorption in the pillar array,leading to a reflectivity contrast ratio of 1:3 over the spectralrange from 400-530 nm. With fast, low-power electrostatic actuationand a broadband response in the visible spectrum, this mechanicallytunable metasurface reflectivity modulator could enable high framerate dynamic reflective displays.

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Broadband mechanically tunable metasurface reflectivity modulator in the visible spectrum.pdf

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Main Document

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openaccess

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CC BY

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6.54 MB

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221e73f066dc13f18ed49be187e06a9b

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