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conference paper
High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
January 1, 2021
2021 Conference On Lasers And Electro-Optics Europe & European Quantum Electronics Conference (Cleo/Europe-Eqec)
Type
conference paper
Web of Science ID
WOS:000728078300892
Authors
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Raja, Arslan S.
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Lihachev, Grigory
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Engelsen, Nils J.
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Publication date
2021-01-01
Publisher
Publisher place
New York
Published in
2021 Conference On Lasers And Electro-Optics Europe & European Quantum Electronics Conference (Cleo/Europe-Eqec)
ISBN of the book
978-1-6654-1876-8
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
ELECTR NETWORK | Jun 21-25, 2021 | |
Available on Infoscience
February 14, 2022
Use this identifier to reference this record