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  4. A novel pneumatic actuator system realised by microelectro-discharge machining
 
conference paper

A novel pneumatic actuator system realised by microelectro-discharge machining

Hirata, T.
•
Akashi, T.
•
Bertholds, A.
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1998
MEMS '98 11th Annual International Workshop on Micro Electro Mechanical Systems
  • Details
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Type
conference paper
DOI
10.1109/MEMSYS.1998.659747
Author(s)
Hirata, T.
Akashi, T.
Bertholds, A.
Gruber, H. P.
Schmid, A.
Grétillat, M.-A.
Guenat, O.
de Rooij, N. F.  
Date Issued

1998

Published in
MEMS '98 11th Annual International Workshop on Micro Electro Mechanical Systems
Start page

160

End page

165

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39388
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