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research article
Binary zero-order diffractive and anti-reflective optical elements in silicon for the mid-infrared
2017
We propose a novel method for the design of binary 2-level diffractive optical elements that provide an efficient diffractive function while reducing the reflectivity of a high-index interface. The structure can be fabricated with a single patterning step and is particularly useful for the mid-infrared spectral range. The concept is based on zero-order transmission gratings using subwavelength micro-structures. To demonstrate the concept a Dammann grating has been realized in silicon and characterized in the mid-infrared by scanning the far-field intensity distribution.
Type
research article
Web of Science ID
WOS:000407640000045
Publication date
2017
Publisher
Published in
Volume
42
Issue
16
Start page
3233
End page
3235
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
August 31, 2017
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