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research article

Characterization and Analysis of On-Chip Microwave Passive Components at Cryogenic Temperatures

Patra, Bishnu
•
Mehrpoo, Mohammadreza
•
Ruffino, Andrea  
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January 1, 2020
Ieee Journal Of The Electron Devices Society

This paper presents the characterization and modeling of microwave passive components in TSMC 40-nm bulk CMOS, including metal-oxide-metal (MoM) capacitors, transformers, and resonators, at deep cryogenic temperatures (4.2 K). To extract the parameters of the passive components, the pad parasitics were de-embedded from the test structures using an open fixture. The variations in capacitance, inductance and quality factor are explained in relation to the temperature dependence of the physical parameters, and the resulting insights on the modeling of passives at cryogenic temperatures are provided. Modeling the characteristics of on-chip passive components, presented for the first time down to 4.2K, is essential in designing cryogenic CMOS radio-frequency integrated circuits, a promising candidate to build the electronic interface for scalable quantum computers.

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Type
research article
DOI
10.1109/JEDS.2020.2986722
Web of Science ID

WOS:000533896600002

Author(s)
Patra, Bishnu
Mehrpoo, Mohammadreza
Ruffino, Andrea  
Sebastiano, Fabio
Charbon, Edoardo  
Babaie, Masoud
Date Issued

2020-01-01

Published in
Ieee Journal Of The Electron Devices Society
Volume

8

Issue

1

Start page

448

End page

456

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

cryogenics

•

capacitors

•

metals

•

probes

•

q-factor

•

temperature

•

cryo-cmos

•

quantum computing

•

cryogenic

•

capacitor

•

inductor

•

transformer

•

resonator

•

quality factor

•

rf characterization

•

cmos technology

•

frequency

•

inductors

Note

This work is licensed under a Creative Commons Attribution 4.0 License.

Editorial or Peer reviewed

REVIEWED

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May 31, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/169018
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