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conference paper
Electro-Mechanical Modeling of MEMS Resonators with MOSFET detection
2005
MSM 2005 (Nanotech)
Type
conference paper
Author(s)
Date Issued
2005
Journal
MSM 2005 (Nanotech)
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record