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  4. 1200 V Multi-Channel Power Devices with 2.8 Ω•mm ON-Resistance
 
conference paper

1200 V Multi-Channel Power Devices with 2.8 Ω•mm ON-Resistance

Ma, Jun  
•
Erine, Catherine  
•
Zhu, Minghua  
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December 7, 2019
2019 IEEE International Electron Devices Meeting (IEDM)
2019 IEEE International Electron Devices Meeting (IEDM)

Here we report novel multi-channel AlGaN/GaN MOSHEMTs with high breakdown voltage (V BR ) and low ON-resistance (R ON ). The multi-channel structure was judiciously designed to yield a small sheet resistance (R s ) of 80 Ω/sq using only four 2DEG channels, resulting in an effective resistivity (ρ eff ) of only 1.1 mΩ•mm. The major limitation of high-conductivity multi-channel devices is their limited V BR . This work shows that while conventional field plates (FPs) are not suited to increase V BR in high-conductivity multi-channels, slanted tri-gates offer better electric field management inside the device. With a gate-to-drain separation (L GD ) of 15 µm, the device presented a low R ON of 2.8 Ω•mm (considering the full width of the device (w device )) and a high V BR of 1230 V, rendering a small specific R ON (R ON,SP ) of 0.47 mΩ•cm 2 and an excellent figure-of-merit of 3.2 GW/cm 2 . This work also shows the feasibility of E-mode multi-channel MOSHEMTs with a threshold voltage (V TH ) of +0.9 V at 1 µA/mm by tuning the tri-gate geometry. These results significantly outperform conventional single-channel devices and demonstrate the enormous potential of multi-channel power devices.

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Type
conference paper
DOI
10.1109/IEDM19573.2019.8993536
Web of Science ID

WOS:000553550000105

Author(s)
Ma, Jun  
Erine, Catherine  
Zhu, Minghua  
Luca, Nela  
Xiang, Peng
Cheng, Kai
Matioli, Elison  
Date Issued

2019-12-07

Publisher

IEEE

Published in
2019 IEEE International Electron Devices Meeting (IEDM)
Start page

4.1.1

End page

4.1.4

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
Event nameEvent placeEvent date
2019 IEEE International Electron Devices Meeting (IEDM)

San Francisco, CA, USA

December 7-11, 2019

Available on Infoscience
March 12, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/167238
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