Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. 1200 V Multi-Channel Power Devices with 2.8 Ω•mm ON-Resistance
 
conference paper

1200 V Multi-Channel Power Devices with 2.8 Ω•mm ON-Resistance

Ma, Jun  
•
Erine, Catherine  
•
Zhu, Minghua  
Show more
December 7, 2019
2019 IEEE International Electron Devices Meeting (IEDM)
2019 IEEE International Electron Devices Meeting (IEDM)

Here we report novel multi-channel AlGaN/GaN MOSHEMTs with high breakdown voltage (V BR ) and low ON-resistance (R ON ). The multi-channel structure was judiciously designed to yield a small sheet resistance (R s ) of 80 Ω/sq using only four 2DEG channels, resulting in an effective resistivity (ρ eff ) of only 1.1 mΩ•mm. The major limitation of high-conductivity multi-channel devices is their limited V BR . This work shows that while conventional field plates (FPs) are not suited to increase V BR in high-conductivity multi-channels, slanted tri-gates offer better electric field management inside the device. With a gate-to-drain separation (L GD ) of 15 µm, the device presented a low R ON of 2.8 Ω•mm (considering the full width of the device (w device )) and a high V BR of 1230 V, rendering a small specific R ON (R ON,SP ) of 0.47 mΩ•cm 2 and an excellent figure-of-merit of 3.2 GW/cm 2 . This work also shows the feasibility of E-mode multi-channel MOSHEMTs with a threshold voltage (V TH ) of +0.9 V at 1 µA/mm by tuning the tri-gate geometry. These results significantly outperform conventional single-channel devices and demonstrate the enormous potential of multi-channel power devices.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

IEDM_infoscience.pdf

Access type

openaccess

Size

2.99 MB

Format

Adobe PDF

Checksum (MD5)

cd958fa354ae61b38af5e34d9e523c67

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés