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research article

Room temperature Si-Ti thermopile THz sensor

Ben Mbarek, Sofiane
•
Euphrasie, Sebastien
•
Baron, Thomas
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2015
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems

In this paper, we present the conception, fabrication and characterization of a thermopile designed to detect terahertz electromagnetic fields at room temperature. The thermopile is made of four doped silicon/titanium thermocouples. The absorber consists of a metallic grid made of titanium, deposited at the same time as the metal part of the thermocouples. The design of the grid is based on a theoretical multilayer model using equivalent resistivity and taking into account small diffraction effects. The grid is deposited on a 2.4 mm x 2.4 mm silicon nitride square membrane. The time constant of the sensor is measured at 0.3 THz to be 10 ms, which is consistent with finite elements simulations. The responsivity is evaluated at 4.8 mu V/(W m(-2)). Due to a large impedance, which leads to a large Johnson noise, the noise equivalent power is 1.5 x 10(-6) W Hz(-1/2).

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Type
research article
DOI
10.1007/s00542-014-2252-2
Web of Science ID

WOS:000358211400006

Author(s)
Ben Mbarek, Sofiane
•
Euphrasie, Sebastien
•
Baron, Thomas
•
Thiery, Laurent
•
Vairac, Pascal
•
Briand, Danick  
•
Guillet, Jean-Paul
•
Chusseau, Laurent
Date Issued

2015

Publisher

Springer Verlag

Published in
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems
Volume

21

Issue

8

Start page

1627

End page

1631

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
September 28, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/118868
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