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research article

Suppressing Nucleation in Metal–Organic Chemical Vapor Deposition of MoS2

Kim, Hokwon  
•
Ovchinnikov, Dmitry  
•
Deiana, Davide  
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2017
Nano Letters

Toward the large-area deposition of MoS2 layers, we employ metal–organic precursors of Mo and S for a facile and reproducible van der Waals epitaxy on c-plane sapphire. Exposing c-sapphire substrates to alkali metal halide salts such as KI or NaCl together with the Mo precursor prior to the start of the growth process results in increasing the lateral dimensions of single crystalline domains by more than 2 orders of magnitude. The MoS2 grown this way exhibits high crystallinity and optoelectronic quality comparable to single-crystal MoS2 produced by conventional chemical vapor deposition methods. The presence of alkali metal halides suppresses the nucleation and enhances enlargement of domains while resulting in chemically pure MoS2 after transfer. Field-effect measurements in polymer electrolyte-gated devices result in promising electron mobility values close to 100 cm2 V–1 s–1 at cryogenic temperatures.

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Type
research article
DOI
10.1021/acs.nanolett.7b02311
Web of Science ID

WOS:000407540300075

Author(s)
Kim, Hokwon  
Ovchinnikov, Dmitry  
Deiana, Davide  
Unuchek, Dmitrii  
Kis, Andras  
Date Issued

2017

Publisher

American Chemical Society (ACS)

Published in
Nano Letters
Volume

17

Issue

8

Start page

5056

End page

5063

Subjects

TMDCs

•

MoS2

•

2D semiconductors

•

Chemical vapor deposition

•

FET devices

•

microstructure engineering

•

nucleation and growth

•

two-dimensional transition metal dichalcogenides

Editorial or Peer reviewed

REVIEWED

Written at

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CIME  
Available on Infoscience
July 18, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/139356
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