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research article

Laser soldered packaging hermeticity measurement using metallic conductor resistance

Seigneur, Frank
•
Maeder, Thomas  
•
Jacot, Jacques  
2006
Electron Technology

Packaging is the last step of the manufacturing process of Microsystems. The LPM is working on the development of a two-part soldered packaging. One part of the package is metallic; the other part is made of glass. The goal of the project is to solder the two parts of the package using a laser diode. The advantages of the laser soldered joint are its hermeticity to water and air in regard to glue and plastics, as well as the possibility to heat only the soldered joint, without affecting its contents. This work presents results of this packaging process, together with a method used to measure the hermeticity based on the oxidation of a heated metal conductor such as tungsten. The resistance of the conductor, which is encapsulated inside the package, increases as oxygen and water diffuse through the seal, which provides a convenient semi-quantitative measurement.

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Type
research article
Author(s)
Seigneur, Frank
Maeder, Thomas  
Jacot, Jacques  
Date Issued

2006

Published in
Electron Technology
Volume

37/38

Issue

8

Subjects

technologie des couches épaisses

•

thick-film technology

•

packaging hermétique

•

hermetic packaging

•

laser soldering

•

brasure tendre par laser

Note

Invited for publication following XXX Intl. Conf. IMAPS Poland chapter

URL

URL

http://www.ite.waw.pl/etij/vol_37_38.html
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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LPM  
Available on Infoscience
September 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/42596
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