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research article

A Resonant Graphene NEMS Vibrometer

Moreno-Garcia, Daniel  
•
Fan, Xuge
•
Smith, Anderson D.
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May 30, 2022
Small

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

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Type
research article
DOI
10.1002/smll.202201816
Web of Science ID

WOS:000802927600001

Author(s)
Moreno-Garcia, Daniel  
•
Fan, Xuge
•
Smith, Anderson D.
•
Lemme, Max C.
•
Messina, Vincenzo
•
Martin-Olmos, Cristina
•
Niklaus, Frank
•
Villanueva, Luis Guillermo  
Date Issued

2022-05-30

Publisher

WILEY-V C H VERLAG GMBH

Published in
Small
Article Number

2201816

Subjects

Chemistry, Multidisciplinary

•

Chemistry, Physical

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Physics, Condensed Matter

•

Chemistry

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

graphene

•

laser doppler vibrometry

•

nano-electromechanical (nems)

•

resonators

•

vibration

•

accelerometer

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
June 20, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/188672
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