research article
Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
2007
Type
research article
Author(s)
Ioannou-Sougleridis, V
Dimitrakis, P
Em Vamvakas, V
Normand, Pascal
Bonafos, Caroline
Schamm, Sylvie
Ben Assayag, Gerard
Paillard, Vincent
Date Issued
2007
Published in
Volume
18
Issue
21
Article Number
215204
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 9, 2009
Use this identifier to reference this record