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conference paper

Packaged MEMS Micromirrors for Cyrogenic Environment

Waldis, S.
•
Zamkostian, F.
•
Lanzoni, P.
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2008
MEMS 2008
Type
conference paper
DOI
10.1109/MEMSYS.2008.4443767
Author(s)
Waldis, S.
•
Zamkostian, F.
•
Lanzoni, P.
•
Noell, W.  
•
de Rooij, N. F.  
Date Issued

2008

Journal
MEMS 2008
Start page

758

End page

761

Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40010