Control of a High Performance 3 DOF Linear Direct Drive Operating with Submicron Precision

conference paper not in proceedings

Sprenger, B.

•

Binzel, O.

•

1998

Type

conference paper not in proceedings

Authors

Sprenger, B.

•

Binzel, O.

•

Publication date

1998

URL

Conference Web Site

Peer reviewed

REVIEWED

EPFL units

Event name	Event place	Event date
Fourth International Conference on Motion and Vibration Control	ETH Zurich	August 25-28

Available on Infoscience

December 7, 2006

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