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  4. Port: A Piezoelectric Optical Resonance Tuner
 
conference paper

Port: A Piezoelectric Optical Resonance Tuner

Dung, Bin
•
Tian, Hao
•
Zervas, Michael  
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2018
Ieee Micro Electro Mechanical Systems (Mems)
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q(optical) of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 mu s.

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Type
conference paper
DOI
10.1109/MEMSYS.2018.8346661
Author(s)
Dung, Bin
Tian, Hao
Zervas, Michael  
Kippenberg, Tobias J.  
Bhave, SA
Date Issued

2018

Publisher

IEEE

Publisher place

New York

Published in
Ieee Micro Electro Mechanical Systems (Mems)
ISBN of the book

978-1-5386-4782-0

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

739

End page

742

Subjects

kerr frequency combs

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Event nameEvent placeEvent date
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Belfast, NORTH IRELAND

Jan 21-25, 2018

Available on Infoscience
November 8, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/150792
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