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research article

Phase masks for electron microscopy fabricated by thermal scanning probe lithography

Hettler, Simon
•
Radtke, Lucas
•
Grünewald, Lukas
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October 3, 2019
Micron
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Phase masks for electron microscopy fabricated by thermal scanning probelithography.pdf

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Publisher's version

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restricted

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1.98 MB

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Adobe PDF

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