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research article

Some electronic and metastability properties of a new nanostructured material: hydrogenated polymorphous silicon

Butte, R.  
•
Meaudre, R.
•
Meaudre, M.
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1999
Philosophical Magazine B-Physics of Condensed Matter Statistical Mechanics Electronic Optical and Magnetic Properties

When silicon thin films are deposited by plasma enhanced chemical vapour deposition in a plasma regime close to that of the formation of powder, a new type of material, called polymorphous silicon (pm-Si), is obtained. We present here the optoelectronic and stability properties of pm-Si films deposited from a mixture of silane diluted with hydrogen at total gas pressures in the range 800-1600 mTorr. A comparison with the properties of standard hydrogenated amorphous silicon (a-Si:H) is made. While some properties of both materials are similar, many others differ in a striking manner. Characterizations of as-deposited pm-Si films show that the best samples exhibit enhanced transport properties, such as the fact that the quantum efficiency-mobility-lifetime product eta mu tau is increased by a factor of 200-700 compared with that measured on a-Si:H under the same conditions. This correlates with a lower density of deep states. The kinetics of creation of defects, performed under 670 mW cm(-2) white light illumination and at a high temperature (100 degrees C) in order to attain a final steady state, have been studied, pm-Si samples exhibit faster kinetics of creation as well as of annealing of metastable defects than do a-Si:H samples. In their light-soaked state the best pm-Si samples exhibit eta mu tau products of the same order as those measured on device-grade a-Si:H in the annealed state. These enhanced transport properties, new properties and better stability are linked to the peculiar structure of pm-Si, namely ordered silicon nanoparticles embedded in an amorphous matrix.

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Type
research article
DOI
10.1080/13642819908214860
Author(s)
Butte, R.  
•
Meaudre, R.
•
Meaudre, M.
•
Vignoli, S.
•
Longeaud, C.
•
Kleider, J. P.
•
Cabarrocas, P. R. I.
Date Issued

1999

Published in
Philosophical Magazine B-Physics of Condensed Matter Statistical Mechanics Electronic Optical and Magnetic Properties
Volume

79

Issue

7

Start page

1079

End page

1095

Subjects

A-SI-H

•

AMORPHOUS-SILICON

•

DEFECTS

•

ILLUMINATION

•

PHOTOCONDUCTIVITY

•

CONDUCTIVITY

•

EQUILIBRIUM

•

DEPOSITION

•

DENSITY

•

MODEL

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/54864
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