research article
Thermal-Decomposition of Sicl4 as Applied to Silicon Microdeposition on a Single-Crystal Surface
Type
research article
Author(s)
Jost, D.
Salathe, R. P.
Luthy, W.
Weber, H. P.
Date Issued
1984
Published in
Volume
188
Issue
AUG
Start page
125
End page
INOR
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
January 20, 2009
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