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research article
Thermal-Decomposition of Sicl4 as Applied to Silicon Microdeposition on a Single-Crystal Surface
Type
research article
Authors
Jost, D.
•
Salathe, R. P.
•
Luthy, W.
•
Weber, H. P.
Publication date
1984
Volume
188
Issue
AUG
Start page
125
End page
INOR
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
January 20, 2009
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