conference paper
Portable optical microscope-on-a-chip
2006
Progress in Biomedical Optics and Imaging - Proceedings of SPIE
In this paper, we present a novel high resolution optical imaging device on chip. It is based on a line of nano holes defined in an optically opaque aluminum film on a CMOS imaging sensor chip. Because it's free of bulky optical elements and compatible to the planar micro fabrication process, it is very promising to become an important component for the on-chip high resolution imaging in the future. The fabrication and operation of this novel on-chip microscope is explained in details. The performance is evaluated theoretically and is verified experimentally by examining the profile of a laser spot formed by a 10X objective lens.
Type
conference paper
Scopus ID
2-s2.0-33745191882
Author(s)
Date Issued
2006
Published in
Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume
6095
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
November 23, 2010
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