Minimized Blurring in Stencil Lithography using a Compliant Membrane

conference paper

Minimized Blurring in Stencil Lithography using a Compliant Membrane

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Vazquez-Mena, O.

2009

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Name

Sidler_2009_Trans_Minimized Blurring.pdf

Access type

openaccess

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107.21 KB

Format

Adobe PDF

Checksum (MD5)

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