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  4. Large Arrays Of Inkjet-Printed Mems Microbridges On Foil
 
conference paper

Large Arrays Of Inkjet-Printed Mems Microbridges On Foil

Molina-Lopez, Francisco  
•
Briand, Danick  
•
de Rooij, Nico F.  
2014
The 27th International Conference On Micro Electro Mechanical Systems (Mems)
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

This works describes the fabrication process of an array of printed MEMS microbridges on polymeric foil, performed in only four easy steps. Each functional material was deposited exclusively by inkjet-printing technique, compatible with large-area fabrication. The array occupies an area of 2 mm x 2 mm and consists of 80 individual microbridges of 120 mu m x 80 mu m size each. When connecting all the bridges in parallel, the array displays a total capacitance value of 1.5 pF. The potential of the fabricated array has been demonstrated by employing it as a swelling-based capacitive humidity sensor where the polymeric substrate acts directly as the sensing layer.

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Type
conference paper
DOI
10.1109/MEMSYS.2014.6765688
Web of Science ID

WOS:000352217500131

Author(s)
Molina-Lopez, Francisco  
•
Briand, Danick  
•
de Rooij, Nico F.  
Date Issued

2014

Publisher

IEEE

Publisher place

New York

Published in
The 27th International Conference On Micro Electro Mechanical Systems (Mems)
Total of pages

4

Start page

506

End page

509

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

San Francisco, CA, USA

January 26-30, 2014

Available on Infoscience
May 29, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114792
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