book part or chapter
Ellipsometry
Saxena, Indu
Rastogi, P. K.
1997
Optical Metrology
Type
book part or chapter
Author(s)
Saxena, Indu
Editors
Rastogi, P. K.
Date Issued
1997
Publisher
Published in
Optical Metrology
Written at
EPFL
EPFL units
Available on Infoscience
March 10, 2006
Use this identifier to reference this record