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conference paper
AFM benchmark for the profile characterization of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics NEMO
2006
Optical Micro- and Nanometrology in Microsystems Technology
Type
conference paper
Authors
Destouches, N.
•
•
Nakagawa, W.
•
Ottevaere, H.
•
Pietarinen, J.
•
Reynaud, S.
•
Tervo, J.
•
Tonchev, S.
•
Turunen, J.
•
Kujawinska, M.
Publication date
2006
Published in
Optical Micro- and Nanometrology in Microsystems Technology
Series title/Series vol.
Proc. SPIE; 6188
Start page
61881K
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record