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  4. p-NiO Junction Termination Extensions for High Voltage Vertical GaN Devices
 
conference paper

p-NiO Junction Termination Extensions for High Voltage Vertical GaN Devices

Khadar, Riyaz Abdul
•
Floriduz, Alessandro  
•
Wang, Taifang  
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January 1, 2021
2021 33Rd International Symposium On Power Semiconductor Devices And Ics (Ispsd)
33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD)

In this paper, we illustrate the use of RF-sputtered p-NiO to fabricate Junction Termination Extensions (JTEs) for high-performance vertical GaN-on-Si Schottky Barrier Diodes (SBDs). The GaN epitaxial structures were grown on 6-inch Si wafers by MOCVD. The fabricated SBDs with p-NiO JTEs exhibited a low specific on-state resistance of 3 m Omega cm(2) (20% lower than in reference SBDs without JTEs) and their breakdown voltage was improved to 433 V, the highest value ever reported for GaN-on-Si SBDs. Our work shows the great potential of p-NiO to achieve highly effective players for use in vertical GaN power devices.

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Type
conference paper
DOI
10.23919/ISPSD50666.2021.9452255
Web of Science ID

WOS:000684581000036

Author(s)
Khadar, Riyaz Abdul
Floriduz, Alessandro  
Wang, Taifang  
Erine, Catherine  
van Erp, Remco  
Nela, Luca  
Soleimanzadeh, Reza  
Sohi, Pirouz  
Matioli, Elison  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 33Rd International Symposium On Power Semiconductor Devices And Ics (Ispsd)
ISBN of the book

978-4-88686-422-2

Series title/Series vol.

Proceedings of the International Symposium on Power Semiconductor Devices & ICs

Start page

147

End page

150

Subjects

Computer Science, Hardware & Architecture

•

Engineering, Electrical & Electronic

•

Computer Science

•

Engineering

•

gan

•

p-nio

•

jte

•

sbd

•

heterojunction

•

p-i-n

•

diode

•

schottky

•

rectifiers

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
Event nameEvent placeEvent date
33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD)

Nagoya, JAPAN

May 30-Jun 03, 2021

Available on Infoscience
September 25, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/181601
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