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  4. Direct high-temperature growth of GaN on Si using trimethylaluminum preflow enabling vertically-conducting heterostructures
 
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research article

Direct high-temperature growth of GaN on Si using trimethylaluminum preflow enabling vertically-conducting heterostructures

Floriduz, Alessandro  
•
Choi, Uiho  
•
Matioli, Elison  
June 3, 2024
Japanese Journal Of Applied Physics

In this work, we demonstrate that GaN can be directly grown at high temperature on Si(111) substrates by metalorganic CVD without using any intentional AlN buffer, by simply employing a trimethylaluminum (TMAl) preflow. We found that n-GaN layers directly grown on n-Si with a TMAl preflow not only present a better crystalline quality compared to the use of thin AlN buffers, but also exhibit orders-of-magnitude improvement in vertical current conduction between GaN and Si, thanks to the absence of highly resistive AlN layers. Our proposed technique opens a new pathway for the effective realization of fully-vertical GaN-on-Si devices.

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Type
research article
DOI
10.35848/1347-4065/ad5480
Web of Science ID

WOS:001253525000001

Author(s)
Floriduz, Alessandro  
•
Choi, Uiho  
•
Matioli, Elison  
Date Issued

2024-06-03

Publisher

Iop Publishing Ltd

Published in
Japanese Journal Of Applied Physics
Volume

63

Issue

6

Article Number

060904

Subjects

Physical Sciences

•

Mocvd

•

Gan

•

Fully-Vertical

•

Gan-On-Si

•

Preflow

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
FunderGrant Number

Swiss National Science Foundation (SNSF)

200021_200652

Available on Infoscience
July 3, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/209170
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