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research article
LF55GN photosensitive flexopolymer: a new material for ultra-thick and high aspect-ratio MEMS fabrication
Type
research article
Web of Science ID
WOS:000247219200009
Authors
Publication date
2007
Published in
Volume
16
Start page
564
End page
570
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
January 16, 2008
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