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research article
Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning
2007
We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
Type
research article
Authors
Publication date
2007
Publisher
Published in
Volume
3
Issue
1
Start page
132
End page
138
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
July 4, 2011
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